Chapter 5 - The Theory of Wide-Field Step Recovery
Diodes (WFSRD)
5.1 - Remarks on the Philosophy Adopted in This Study
Before beginning to discuss the theoretical aspects of the WFSRD, it is important to first note
the approach taken by this author. It was concluded based on the results of Chapter 3 that the desired devices were
likely diffused structures, and it is obvious that the diodes must be under high-level injection conditions for
reasonable forward bias given the light doping required to support high breakdowns voltages. This situation is thus
not likely to immediately offer simple exact analytical results: most analytical studies in the literature
and in textbooks deal strictly with abrupt junctions and/or low-level injection. Most of the common simplifying
approximations are not appropriate in this case. For this reason, computer simulations were used as a primary tool
in this study. In particular, simple one-dimensional diffused structures were simulated many times using MEDICI, a
powerful large-signal semiconductor simulator. The theoretical results in this section were developed after noting
patterns in the simulations. For this reason, the approach taken in this section is to introduce particular diode
structures with known (simulated) characteristics, and then develop the analytical theory, rather than starting
"from scratch". The fabricated devices reported in later sections are almost ideal parallel-plane structures, so
the one-dimensional simulations are directly applicable.
One other aspect should be noted. The diodes studied here have been developed with pulse
generator applications in mind, since this is the context in which this phenomenon was discovered. This means the
diodes are intended to act as pulse sharpeners. Given their similarity to SRDs, they may also prove to be useful in
frequency multiplication applications. These applications have not been considered here.
5.2 - Introductory Reference Structures
5.2.1 - Abrupt Structures versus Diffused Structures
For the purposes of comparison, two reference structures are introduced in this section. The
first structure, shown in Figure 5.1, is an ideal abrupt pspn diode that shall be referred to herein as EP1. The
second, shown in Figure 5.2 is a diffused diode, with two gaussian profiles superimposed on a uniform background,
and shall be referred to herein as DF1. More precisely, for Figure 5.2,
(5.1)
where N(x) is the doping profile, with N(x) > 0 taken to mean net acceptor doping, and N(x)
< 0 net donor doping. NS is the surface concentration, and NB is the wafer background
doping. For both EP1 and DF1, A = 1 mm2, L = 212 m, NS = 1019 cm-3,
NB = 1.2 x 1014 cm-3, and τp0 =
τn0 = 55 ns. For DF1, λ = 29.7 μm. For EP1, W = 30 μm.

Figure 5.1 - Doping Profile of EP1

Figure 5.2 - Doping Profile of
DF1
Figure 2.1 shows the simple reverse-recovery test circuit that has been simulated, with
RL = 50 Ω. The reverse recovery transient should consist of a period of
roughly constant reverse current (IR for time ts) followed by the decay of the current to zero, in time
tR, as discussed in Chapter 2. Figures 5.3 and 5.4 show the simulated transient response for EP1 and DF1
respectively. As expected, EP1 shows the slow ramp/fast transition characteristic of pspn abrupt
rectifiers. When Vd = VRAMP, where VRAMP is obtained from (2.15), the diode
current is determined by the circuit loop equation, giving:
(5.2)
This agrees reasonably well with Figure 5.3, which shows the fast transient beginning at
approximately I = -3.7 A.


The parameters of DF1 have been deliberately chosen to produce a reverse recovery transient that
displays step recovery. It clearly yields a "snappier"transient, although the storage time is reduced, which is
generally undesirable in pulse generator applications.
To understand why EP1 and DF1 behave so differently, the time evolution of the electric fields in
the devices is plotted in Figures 5.5 and 5.6 respectively. It is immediately apparent that the p+ p and p n+
junctions in EP1 produce strong, narrow, one-sided electric field profiles, which of course are characteristic of
abrupt one-sided junctions. In contrast, the field profiles generated by DF1 are much lower and much more diffuse.
They resemble the fields generated at linear junctions. Since the fields generated at the two junctions in the
diode are so much more diffuse, they overlap much sooner in DF1 than EP1. Also, when they overlap, the area under
the electric field curve is much smaller in the case of DF1 than EP1, hence this occurs at a much lower voltage in
the DF1 case. By comparing Figure 5.3 to Figure 5.5, and 5.4 to 5.6, it is evident that the fast transition begins
when the entire middle layer is under high-field conditions. The spread-out nature of the electric field profiles
in the DF1 diode then is the key to high voltage step recovery.


5.2.2 - The Influence of Background Doping
Not all diffused diodes will produce the desired electric field overlap discussed above. The
background doping NB can have a very large impact on the nature of the diode recovery. The influence of
NB can be explained by referring to the Medici simulation results in Figures 5.7 to 5.16. These graphs
show the time evolution of the net charge (that is, p - n + ND+ - NA-) and the current
transient waveform for five different doping profiles, DF2 to DF6 for the circuit in Figure 2.1. All have A = 1
mm2, NS = 1019 cm-3, λ = 29.7
μm, and L = 212 μm. Each has a different background doping: -5 x
1014 cm-3, -1.2 x 1014 cm-3, 0 cm-3, +1.2 x 1014
cm-3, +5 x 1014 cm-3, for DF2 to DF6 respectively. (Positive values refer to
p-type doping.)
The net charge development is quite different in each case. For the two n-type doped diodes, DF2
and DF3, the area of positive net charge appears to propagate from left to right, in a simple fashion. This occurs
because the positive space charge required to form the right side of the p+ n junction is supplied largely by the
ionized donors. The nn+ junction essentially plays no part in the recovery until the charge wave from the p+ n
junction sweeps over to it. In contrast, the space charge required to form the right side of the p+ p junction in
DF5 is initially supplied by mobile holes rather than by fixed charge. As the current falls, the mobile hole
concentration is not sufficient to compensate the ionized acceptors near the p+ p junction. Then, the positive
net-charge peak appears to collapse, rather than propagate, and the necessary positive charge is provided by
ionized donors on the right side of the metallurgical junction.
Since DF2 exhibits a simple expanding charge wave, propagating from the p+ n metallurgical
junction, only one electric field peak develops, as shown in Figure 5.17. In the contrast, DF5 initially develops a
field at the p+ p (non-metallurgical) junction. When the mobile charge is removed from the vicinity of the
metallurgical junction, a second electrostatic junction must form. Thus when the space charge has propagated from
the p+p junction to the metallurgical junction, it forces a second electric field peak to develop in response, as
is shown in Figure 5.18. This causes a substantial electric field to cover to entire middle region, which triggers
the desired fast transition, as all remaining mobile charge carriers are removed from the diode at, or near, their
saturation velocity.
It is important to determine where exactly the p+ p space charge region forms. This is obvious in
abrupt structures, where there is ideally an infinite doping gradient, at which an electrostatic junction must
occur. There is no such singularity in the p+ p diffused junction. As discussed earlier, the positive space charge
in the p+ p junction must be provided by mobile holes. The concentration of mobile holes must exceed the net
acceptor concentration for a net positive charge to exist. The point where these two concentrations are equal (i.e.
zero net charge) defines the p+ p junction (if one neglects mobile electrons). Since a large electric field
develops at the junction rather quickly, as witnessed in Figure 5.18, and since hole and electrons velocities start
to saturate at relatively low electric fields (>> 104 V/cm) compared to the
scale in Figure 5.18, the hole density in the space-charge region can be approximated as
(5.3)
For the circuit of Figure 2.1, p0 = 3.7 x 1014 cm-3 (again using
A = 1 mm2). This concentration is noted on the net charge graphs with a thin solid line. Since the net
charge is equal to the negative of the doping at the end of the transient, the intersection of the last time curve
and p0 indicates the starting position of the p+ p junction, xp0. xp0 is also
shown on the net charge graphs, by a thin vertical line.
It is fairly straightforward to deduce that NB must fall between 0 and p0.
If NB < 0, (as is the case in Figures 5.7 to 5.10) the positive space charge will be composed largely
of fixed ionized donors, so the junction will not need to extend into the n+ regions to uncover fixed charge until
near the end of the transient, as noted earlier. Thus the desired double-peaked electric field does not
develop.
The net charge evolution for DF6 in Figure 5.16 depicts a situation where NB >
p0. In this case, the mobile charge is unable to build a significant positive space charge to the left
of the metallurgical junction. This leads to the development of a significant electrostatic junction at the
metallurgical junction only, so a single peaked electric field develops. While this does lead to a good waveform,
as shown in Figure 5.15, it is no better than the more lightly doped DF5 waveform (where 0 < NB <
p0), and the breakdown voltage is significantly worse. Medici simulations show that DF5 has
VBR>> 660V, whereas DF6 has VBR>> 550V.
Thus one can conclude that for step recovery to occur, one should have
(5.4)
or, equivalently,
(5.5)
where
(5.6)
In equation (5.5) the general charge removal velocity vR has been used rather than
vS as in (5.1). This is because usually the electric fields at the beginning of the fast transient are
not quite high enough to fully saturate the electron and hole velocities. In practice, the best results have been
obtained using:
(5.7)
DF4 is an intermediate case with NB = 0. It shows elements of both charge propagation
and charge collapse.
Appendix F includes the simulation batch-file used to generate the Medici simulation of DF5, so that future researchers can reproduce these results.












5.3 - General Description of the New SRD Mechanism
Now that some of the salient details have been introduced in the previous section, a general
review of the new proposed SRD mechanism will be provided in this section.
The new SRD mechanism operates as follows. The diode is biased with a small constant forward DC
current. This swamps the middle region of the psn diode with electrons and holes, and high injection conditions
prevail. The diode acts as a low resistance. When a large reverse bias voltage is suddenly applied, the reverse
bias slowly withdraws electrons and hole from the middle region. This region is still largely neutral, so the
current will be almost entirely a diffusion current. This means that the slope of the carrier concentrations will
change. This will lead to the removal of charge from the quasi-neutral middle region, and this region will shrink.
A significant space charge region develops at the p+ p- junction first, as discussed in Chapter 2. However, as
mobile charge is removed from the center, too few holes are left on the p- side of the junction to support a
positive space charge. Since a positive space charge must exist to counterbalance the ionized acceptors in the p+
region, a second space charge region develops around the metallurgical junction, and the positive space charge is
now provided by the ionized donors in the n+ region. This leads to envelopment of the entire middle region with
space charge. After this point, the electric fields rapidly remove the free carriers, and hence the electric fields
rapidly "snap" to the full reverse voltage.
(It should be mentioned that the first SRDs manufactured also had a diffused profile, and a
graded junction [Moll62], [Kocs76]. The graded junction provided a built-in electric field throughout the active
region, which aided in charge removal. This is an entirely different mechanism than that presented here. The
carrier densities are too high, and the doping too low, for significant built-in electric fields to exist in
WFSRDs.)

Figure 5.19 - A typical SRD pulse-sharpening
waveform.
Figure 5.19 shows a typical SRD pulse-sharpening waveform. From this diagram, it is obvious what
must be optimized. The maximum operating voltage must be maximized. This implies that the diode breakdown voltage
VBR must be maximized. It is also desirable to maximize tS. Conversely, tR,
VRAMP, and the effect of the diode capacitance, which manifests itself as a "tail" on the waveform, must
be minimized. At the same time the conditions for step recovery to occur (equations (5.4) to (5.6)) must be
satisfied. Since the occurrence of step recovery and VBR both depend very heavily on NB, it
is obvious that some optimization process will be required.
The remaining section in this chapter will be devoted to determining these parameters from the
diode doping profile. The discussion of the method of determining VBR has already been presented in a
separate chapter, due to its length.
5.4 - Parameter Determination
5.4.1 - NB
For consistency, the results of section 5.2.2 will be repeated here. It was shown that for step
recovery to occur,
(5.8)
or, equivalently,
(5.9)
where
(5.10)
and
(5.11)
It should be noted that the factor g is directly related to the diode cross-sectional area, since
for the circuit of Figure 2.1,
(5.12)
5.4.2 - VRAMP
When the two space charge regions overlap significantly, the voltage developed across the device,
obtained by integrating the electric field:
(5.13)
should be minimized. This voltage is the ramp voltage that one wishes to minimize in a step
recovery diode. Determining the voltage across the device exactly is a difficult problem best suited to simulators
such as MEDICI, however, some simple approximations can be made to avoid this need in the initial stages of
design.
When the space charge regions begin to overlap, the net charge should be zero at two points: at
the p+ p junction xp0, and at the metallurgical junction xmj. This is seen in Figure 5.14 for
the DF5 structure. (From Figures 5.14 and 5.18, it is evident that the space charge regions overlap at instant
"F"). The shape of the positive space charge P(x) between these two points can be approximated as a parabola, that
is:
(5.14)
For the purposes of this approximation, the apex of the parabola will be assumed to be at the
midpoint between xp0 and xmj, such that
(5.15)
Since
(5.16)
one of the constants in (5.14) can be eliminated, this yields:
(5.17)
The voltage developed across the left electric field peak can be estimated by using equation
(5.13) and integrating the positive space charge between xp0 and xmj, so that
(5.18)
The voltage developed across the negative space charge that is to the left of xp0, V-,
must also be accounted for. As a first approximation, it shall be assumed that V+ = V-. Then, evaluating (5.18)
yields a simple expression for the voltage at overlap, VRAMP:
(5.19)
A value for A1 must also be determined. From (5.16) it can be seen that A1
= P(x0), so the space charge at x0 must be found. The net charge QN is the given
by
(5.20)
The doping N(x) can be found directly from (5.1), and the mobile hole concentration p from (5.3).
If one makes the assumption that the mobile electron concentration n is small compared to the other two components,
then
(5.21)
or, using (5.9),
(5.22)
If this is substituted into (5.19), and if it is noted that x0 = (xp0 + xmj)/2 and x = xmj - xp0, then one obtains
(5.23)
In this analysis, it has also been assumed that the voltage developed across the p- n+ junction
is small compared to that of the p+ p- junction. In practice, this assumption is a reasonable one.
Since xp0 and xmj depend on the choice of λ and L, VRAMP will be a complicated function of and L. When designing the diode,
VRAMP(λ,L) must be minimized to achieve a low initial ramp voltage.
However, a second constraint is required to choose an optimum λ and L once
NB has been determined from (5.9). This second constraint is obtained by considering the need to
maximize the breakdown voltage of the device.
5.4.3 - The Transition Time tR
The fast transition begins when a small electric field exists throughout the entire middle
region. In other words, this is the point where the condition of quasineutrality is just beginning to fail
throughout this region. We can make several assumptions to obtain a good approximation of the transition time.
First, we can assume that all electrons have been removed from the left of the metallurgical junction, and all
holes have been removed from the right. Secondly, we can assume the entire middle region is still neutral (such
that the accumulated voltage is very small). Thus, considering the left half of the middle region, every acceptor
is compensated by a mobile hole, and to the right of the junction every donor is compensated by an electron. The
total mobile charge can then be determined by integrating the absolute value of the doping across the depletion
region. We can observe from the electric field and net charge plots previously shown that the edges of the
now-homogeneous space charge region varies very little between the beginning of the fast transient and the end, so
we can use the values of x1 and x2 as calculated in Chapter 4 as the edges of the region. The
third assumption will be that the fast transient voltage is linear with time, which is the ideal waveform. Then the
time can simply be calculated from a charge control approach as
(5.24)
where
(5.25)
or, equivalently,
(5.26)
If one compares the expression given in (5.25) to that given in equation (4.3), it becomes
apparent that (5.24) can be written more simply as
(5.27)
At first glance, the expression in (5.27) may be misleading, in that it suggests that
semiconductors with lower critical fields will have shorter transition times. This is not true, since any decrease
in EC will be more than offset by an increase in A, for a given operating voltage. This is due to the
fact that a lower EC will require a wider depletion region to accommodate the same voltage. However,
(5.19) shows that VRAMP increases approximately quadratically with width, hence A will have to increase
similarly to counterbalance the change in VRAMP. (Increasing A lowers JR, which as shown in
(5.21) will act to lower VRAMP.)
The expression in (5.27) is a fairly simple estimate of tR. Calculating tR
more accurately would require an exact knowledge of the carrier distribution evolution during the reverse
transient, and during the forward steady-state as well. Realistically, this can only be achieved by complete
computer simulations. Several such simulations are presented in Appendix D, in order to gauge the effect of
lifetime variation on tR. This second-order effect is not included in (5.27).
5.4.4 - RC Time Constant
Since, as noted before, the edges of the space charge region are nearly stationary after the
start of the fast transient, the junction capacitance is also nearly constant. It is important to minimize this
capacitance, since it acts to slow down the fast transient, with a time constant of RLC. (RL,
the load resistance, is assumed to be 50 Ω throughout this thesis.) It will add an
exponential "tail" onto the end of the transient, as depicted in Fig 5.19. The junction capacitance can be treated
as a first approximation as a parallel plate capacitor, with plates at x1 and x2;
hence
(5.28)
and
(5.29)
where τRC is the characteristic time constant of the
junction capacitance - load resistance network.
5.4.5 - Storage Time tS
Calculating the storage time is in fact an extremely complicated task if an exact answer is
desired. Knowledge of the actual carrier distribution throughout the diode is required, which is impossible to do
analytically due to the lack of simple boundary conditions in the diffused rectifier. Even for the case of an
abrupt pin geometry with constant recombination lifetimes throughout the i region, the storage time has only been
calculated numerically [Slat80]. Since the device is in high injection, the assumption of constant recombination
lifetimes is not correct.
The storage time can be estimated using simple (but not very accurate) charge control techniques.
This yields equation (3.4), repeated here:
(5.30)
where τEFF is the effective lifetime of the charge carriers
in the device. However, this equation is not especially useful for design, since the carrier lifetimes are highly
dependent on the fabrication process, and are not easily measured. Also, τEFF
is a complex function of parameters, such as the diode structure, low-level carrier lifetimes, and carrier
density.
As mentioned earlier, diffused structures have larger effective lifetimes than comparable
epitaxial structures, since a diffused rectifier will have more stored charge for a given bias current than an
epitaxial rectifier [Coop83]. In an epitaxial rectifier, the stored charge is confined between the two junctions.
The diffused rectifier has much poorer charge confinement, and a considerable additional portion of charge will
exist in the p+ and n+ regions of the diode.
5.5 - Design Methodology
In the previous chapters, expressions for VBR, VRAMP, tR,
and τRC were obtained in terms of the doping profile and circuit parameters.
This chapter presents a method of using the expressions to obtain the best possible device for a given
application.
It is not possible to work backwards from the desired switching parameters and breakdown voltage
to find the best doping. Instead, many doping profiles must be considered, and the parameters calculated for each.
However, for each profile some optimization is required, since the ramp voltage decreases with increasing area,
whereas tR and τRC increase.
A program has been written that will perform the required device optimization. Its operation is
discussed below.
5.5.1 - Optimization
The program considers many different profiles. The user may vary the number of profiles
considered, and what ranges of values are used for NS1, NS2, NB,
λ1, λ1/λ2, and L. For each profile, the breakdown voltage is calculated using the method discussed in
Chapter 4. No optimization is necessary at this point, since VBR is independent of the device
cross-sectional area. If the value of VBR is not within the desired range, the calculations for this
structure are discarded. Otherwise they continue as described below.
The program also lets the user set what fraction of the breakdown voltage the operating voltage
VOP will be. (Ideally, the operating voltage should be slightly less than VBR, but in
practice a safety margin must be added.) Also, the user can set what fraction of VOP the ramp voltage
VRAMP may be. Since rise times are usually defined as 10%-90%, VRAMP is usually set at 10% of
VOP. Any higher would produce an insufficiently "square" waveform, and a smaller value would increase
tR and RC more than necessary.
Given this information, and the calculated values of VBR and VOP, the
program determines the value of g that will yield the desired VRAMP, using equation (5.23). The diode
cross-sectional area can then be determined using (5.12). With all doping and geometrical factors now determined,
tR and τRC can be determined. As a figure of merit, the program
computes
(5.31)
for each structure and ranks each solution, such that the best structure for a given operating
range can be found. (The factor of 2.2 converts the RC time constant to a 10%-90% rise time
[Sedr91]).
Figure 5.20 shows a typical screen shot from the program. At the bottom, the best three
structures are shown. All structures that satisfied the breakdown voltage required were stored in a file as
well.
The figure of merit tEFF is only an approximate figure of merit, so that when choosing
between two structures with very similar tEFF (i.e. ±20%) it is wise to confirm the choice with a
device simulator such as Medici, especially if one is more manufacturable than the other.

Figure 5.20 - Typical screen shot from WFSRD
parameter calculation program.
5.6 - The Chosen Device
Figure 5.21 shows the optimization parameters used to find a good structure to implement a device
with VBR = 500 V and VOP = 300 V. (Note the considerable safety margin.) In Figure 5.21, the
program has been run to display the characteristics of a single structure, the one that was ultimately fabricated.
A rise time (tEFF) of 1.1 ns is predicted for this device. This combination of parameters did not
produce the very best theoretical switching performance, but it had the advantage of having a not-too-small value
of L and small value of λ. (As indicated in Figure 5.20, the fast predicted switching
time was 0.80 ns). The desirability of a large L and a small λare discussed in the
next chapter.

Figure 5.21 - WFSRD parameter calculation program
output for the device to be fabricated.
5.7 - Operating Range Limitations
It is of interest to establish the maximum voltage that WFSRDs can be expected to operate at. To
determine this, the WFSRD parameter calculation program was run many times to determine the fastest devices as a
function of voltage. Several limits were imposed on the search-space, to keep the device practical. In
particular, λ was restricted to vary between 5 μm and
100 μm (in 1 μm steps) , and L was varied between 50
μm and 500 μm (in 5 μm steps). The results are
shown in Figure 5.22.

The results of Figure 5.22 show that the 100 μm limitation on
λ is in fact a severe restriction. The optimal devices would actually occur above this limit.
However, obtaining diffusion lengths above 100 μm is not practical. The 30.6
μm diffusion length used in fabricating the device discussed in the next chapter required an
extremely long drive-in diffusion of 180 hours, and an extremely hot temperature of 1250°C. Since t ∝ λ2, where t is time, the drive-in time required
for λ = 100 μm is excessive (11 weeks at
1250°C).
Figure 5.23 shows the same data as Figure 5.22, except that it is for devices whose switching
time is 33% greater than those in Figure 5.22. It shows that some gains in practicality can be made if non-optimum
devices are used. If a λ of 50 μm is considered the maximum
practical dopant diffusion length (this corresponds to three weeks of drive-in at 1250°C), then practical devices exist for VBR < 1100 V.

These results suggest that the maximum practical operating voltage for DSRDs is on the order of 1
kV. The precise limit is a function of manufacturing constraints. If exceedingly long drive-in times or slower
devices can be tolerated, then devices with higher breakdown voltages can be obtained. However, it is probably more
practical to use multiple lower-voltage devices connected in series.
